 | 초고도 진공(UHV) 엔코더현재 사용 중인 언어로는 이 페이지를 사용할 수 없습니다. Google Translate을 사용하여
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를 볼 수 있습니다. Renishaw에게는 이 서비스를 제공할 책임이 없으며 번역 결과를 저희가 확인하지도 않았습니다.
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 Renishaw UHV encoders are compatible with vacuum pressures as low as 10-11 TORR. The RGH25F UHV encoder system works with RGS20-S tape scale for both linear and partial arc applications. The RGH20F UHV readhead works with the RESR angle encoder, to provide precision rotary feedback. TONiC™ UHV linear encoders and TONiC™ UHV rotary encoders are being added to the range from the second quarter of 2010.
The vacuum range is suitable for many applications including wafer handling/testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more. UHV readheads features and benefits
- Constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean RGA
- Bake-out temperature of 120°C
- Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear
- Industry standard digital and analogue outputs with resolutions to 1 nm
- Low power consumption minimises heat dissipation
- Vented seals
- Adaptive electronics offer high accuracy, long-term reliability and low cyclic error (±50 nm for RGH25F UHV and RGH20F UHV, ±30 nm for TONiC UHV)
- RFI shielded cable with vacuum compatible coated wiring
- TONiC UHV encoder features optical reference mark
Find out more...
RGH25F UHV vacuum compatible linear encoder
RGH20F UHV vacuum compatible rotary (angle) encoder
TONiC UHV vacuum compatible linear encoder
TONiC UHV vacuum compatible rotary (angle) encoder
Notice of obsolescence
Please note that the RGH25U and RGH25 UHV readheads and RGB interface are now obsolete and have been replaced by the RGH25F, RGH25F UHV and REF interface respectively. |
